Handbook of semiconductor manufacturing technology



Publisher: Marcel Dekker in New York

Written in English
Published: Pages: 1157 Downloads: 664
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Subjects:

  • Semiconductors -- Design and construction -- Handbooks, manuals, etc,
  • Semiconductor industry -- Handbooks, manuals, etc

Edition Notes

Includes bibliographical references and index

Statementedited by Yoshio Nishi, Robert Doering ; assistant editor, Tim Wooldrige
GenreHandbooks, manuals, etc
ContributionsNishi, Yoshio, 1940-, Doering, Robert, 1946-
Classifications
LC ClassificationsTK7871.85 .H3335 2000
The Physical Object
Paginationxiv, 1157 p. :
Number of Pages1157
ID Numbers
Open LibraryOL16985321M
ISBN 100824787838
LC Control Number00055564

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